Sensys Instruments sensysinstruments.com


Sensys Instruments Corporation provides integrated metrology applications. The company offers CMS, a compact metrology system for CMP applications; and CD-i, a high throughput, small foot-print system for optical CD applications. It also provides optical CD, thin-film, and overlay integrated metrology solutions to semiconductor process equipment makers. The company was founded in 1996 and is based in Santa Clara, California. Sensys Instruments operates as a wholly owned subsidiary of Therma-Wave...Show all

Sensys Instruments Corporation provides integrated metrology applications. The company offers CMS, a compact metrology system for CMP applications; and CD-i, a high throughput, small foot-print system for optical CD applications. It also provides opt...Show all

Company (Acquired)

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2090 Duane Ave.

Santa Clara, 95050
California, United States

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Total Funding Date of Last Funding
Sensys Instruments $3.1M Mar 15, 2004

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