About Sensys Instruments
Sensys Instruments Corporation provides integrated metrology applications. The company offers CMS, a compact metrology system for CMP applications; and CD-i, a high throughput, small foot-print system for optical CD applications. It also provides optical CD, thin-film, and overlay integrated metrology solutions to semiconductor process equipment makers. The company was founded in 1996 and is based in Santa Clara, California. Sensys Instruments operates as a wholly owned subsidiary of Therma-Wave, Inc., as of March 28, 2004.