Search company, investor...

Sensys Instruments

Founded Year



Acquired | Acquired

Total Raised


About Sensys Instruments

Sensys Instruments Corporation provides integrated metrology applications. The company offers CMS, a compact metrology system for CMP applications; and CD-i, a high throughput, small foot-print system for optical CD applications. It also provides optical CD, thin-film, and overlay integrated metrology solutions to semiconductor process equipment makers. The company was founded in 1996 and is based in Santa Clara, California. Sensys Instruments operates as a wholly owned subsidiary of Therma-Wave, Inc., as of March 28, 2004.

Headquarters Location

2090 Duane Ave.

Santa Clara, California, 95050,

United States

Missing: Sensys Instruments's Product Demo & Case Studies

Promote your product offering to tech buyers.

Reach 1000s of buyers who use CB Insights to identify vendors, demo products, and make purchasing decisions.

Missing: Sensys Instruments's Product & Differentiators

Don’t let your products get skipped. Buyers use our vendor rankings to shortlist companies and drive requests for proposals (RFPs).

Sensys Instruments Frequently Asked Questions (FAQ)

  • When was Sensys Instruments founded?

    Sensys Instruments was founded in 1996.

  • Where is Sensys Instruments's headquarters?

    Sensys Instruments's headquarters is located at 2090 Duane Ave., Santa Clara.

  • What is Sensys Instruments's latest funding round?

    Sensys Instruments's latest funding round is Acquired.

  • How much did Sensys Instruments raise?

    Sensys Instruments raised a total of $3.1M.

  • Who are the investors of Sensys Instruments?

    Investors of Sensys Instruments include Therma-Wave and Band of Angels.

Discover the right solution for your team

The CB Insights tech market intelligence platform analyzes millions of data points on vendors, products, partnerships, and patents to help your team find their next technology solution.

Request a demo

CBI websites generally use certain cookies to enable better interactions with our sites and services. Use of these cookies, which may be stored on your device, permits us to improve and customize your experience. You can read more about your cookie choices at our privacy policy here. By continuing to use this site you are consenting to these choices.