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INDUSTRIAL | Manufacturing / Industrial Equipment & Component Manufacturing

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Founded Year



Acquired | Acquired

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About Sensys Instruments

Sensys Instruments Corporation provides integrated metrology applications. The company offers CMS, a compact metrology system for CMP applications; and CD-i, a high throughput, small foot-print system for optical CD applications. It also provides optical CD, thin-film, and overlay integrated metrology solutions to semiconductor process equipment makers. The company was founded in 1996 and is based in Santa Clara, California. Sensys Instruments operates as a wholly owned subsidiary of Therma-Wave, Inc., as of March 28, 2004.

Sensys Instruments Headquarter Location

2090 Duane Ave.

Santa Clara, California, 95050,

United States

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