Rudolph Technologies designs, develops, manufactures and supports defect inspection, process control metrology, and data analysis systems and software used by semiconductor device manufacturers. Rudolph delivers comprehensive solutions throughout the...Show all
Company (Acquired)
Phone: 973-448-4401
16 Jonspin Road
Wilmington, 01887
Massachusetts, United States
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Title | Application Date | Patent Date | Status (Patent / Application) |
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Substrate handling and identification mechanism | Dec 21, 2017 | May 26, 2020 | Patent |
Inspection of substrates | Mar 22, 2018 | Feb 04, 2020 | Patent |
Semiconductor device inspection of metallic discontinuities | Mar 22, 2018 | Nov 05, 2019 | Patent |
High speed autofocus system | Jul 13, 2016 | Sep 10, 2019 | Patent |
Opto-acoustic metrology of signal attenuating structures | Nov 08, 2016 | Feb 19, 2019 | Patent |