Memsstar, formerly Point 35 Microstructures, is a technology leader in MEMS (Micro Electro-Mechanical Systems) processing, with their proprietary memsstar range of specialist etch and deposition equipment and unique process integration knowledge.
Company (Alive / Active)
Phone: +44 1506 243203
1 Fleming Road
Livingston, EH54 7BN
Scotland, United Kingdom
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Title | Application Date | Patent Date | Status (Patent / Application) |
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Vapour etch of silicon dioxide with improved selectivity | Jan 24, 2012 | Jul 16, 2019 | Patent |
Selectivity in a xenon difluoride etch process | Oct 06, 2017 | Jan 08, 2019 | Patent |
Selectivity in a xenon difluoride etch process | Sep 27, 2010 | Oct 10, 2017 | Patent |
Method of etching a sacrificial silicon oxide layer | Aug 02, 2007 | Mar 25, 2014 | Patent |