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nanoplas.eu

Stage

Angel | Dead

Total Raised

$830K

Last Raised

$830K

About Nanoplas

Provider of equipment specializing in innovative dry processing for the next generation of integrated circuit (IC) devices. The company's process tools are designed to be used in the complex production flow of ICs, for photo-resist stripping, isotropic etching, advanced surface preparation, and contamination removal. The products are dedicated to advanced micro-electro-mechanical systems (MEMS) manufacturing and exotic materials. Processes for 3-D through-silicon vias (TSVs), high aspect ratio structures, and the processing of ultra-sensitive materials are also being developed.

Nanoplas Headquarter Location

Centre Scientifique Batiment 503 - Boite Postale 01

Orsay, 91401,

France

33 1 69 35 87 70

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Nanoplas Patents

Nanoplas has filed 1 patent.

patents chart

Application Date

Grant Date

Title

Related Topics

Status

7/22/2013

Plasma physics, Industrial gases, Breathing gases, Gas technologies, Gases

Application

Application Date

7/22/2013

Grant Date

Title

Related Topics

Plasma physics, Industrial gases, Breathing gases, Gas technologies, Gases

Status

Application

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