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Total Funding Date of Last Funding
KLA $0M Jan 27, 2018

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Patents

Title Application Date Patent Date Status
(Patent / Application)
Low pressure gas transfer device Jun 30, 2010 Oct 22, 2013 Patent
Extending the lifetime of a deep uv laser in a wafer inspection tool Jun 06, 2011 Apr 30, 2013 Patent
Transverse magnetic field voltage isolator May 22, 2008 Nov 03, 2009 Patent
Removable nozzle assembly and gas transfer system Jun 10, 2016 Application
System and method for imaging a sample with an electron beam with a filtered energy spread Aug 13, 2015 Application