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Technology Market Intelligence
IMS Nanofabrication is a strong innovator of emerging technologies in the semiconductor and nanotech industry, covering both lithography and resist-less 2D / 3D direct structuring of materials. nnThe company develop massively parallel charged particl...Show all
Company (Alive / Active)
Phone:
Schreygasse 3
A-12
Austria
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| Title | Application Date | Patent Date | Status (Patent / Application) |
|---|---|---|---|
| Charged-particle source and method for cleaning a charged-particle source using back-sputtering | Jan 28, 2019 | Nov 17, 2020 | Patent |
| Non-linear dose- and blur-dependent edge placement correction | Jan 03, 2019 | May 12, 2020 | Patent |
| Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing apparatus | Aug 20, 2018 | Dec 31, 2019 | Patent |
| Multi-beam writing using inclined exposure stripes | May 11, 2016 | Sep 10, 2019 | Patent |
| Advanced dose-level quantization for multibeam-writers | Jan 25, 2018 | Jun 18, 2019 | Patent |
