IMS Nanofabrication ims.co.at


IMS Nanofabrication is a strong innovator of emerging technologies in the semiconductor and nanotech industry, covering both lithography and resist-less 2D / 3D direct structuring of materials. nnThe company develop massively parallel charged particle (electron / ion) printing technologies for cost effective patterning in the nanometer range onto a range of substrates.

IMS Nanofabrication is a strong innovator of emerging technologies in the semiconductor and nanotech industry, covering both lithography and resist-less 2D / 3D direct structuring of materials. nnThe company develop massively parallel charged particl...Show all

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Schreygasse 3
A-12
Austria

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Total Funding Date of Last Funding
IMS Nanofabrication $0M Dec 7, 2012

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Patents

Title Application Date Patent Date Status
(Patent / Application)
Bi-directional double-pass multi-beam writing Mar 18, 2016 Oct 24, 2017 Patent
Multi-beam writing of pattern areas of relaxed critical dimension Mar 17, 2016 May 16, 2017 Patent
Correction of short-range dislocations in a multi-beam writer Sep 03, 2015 Feb 14, 2017 Patent
Compensation of imaging deviations in a particle-beam writer using a convolution kernel Jul 09, 2015 Dec 13, 2016 Patent
Compensation of dose inhomogeneity using overlapping exposure spots May 29, 2015 Nov 15, 2016 Patent
See all 34 patents