Hermes Microvision is committed to the research and development of advanced E-beam Inspection (EBI) tools and solutions for the leading semiconductor manufacturing fabs. HMI is a supplier of EBI tools for both foundry and memory fabs worldwide.
Phone: +886 3 666 9229
7F, No.18, Puding Road, East Dist.
Hsinchu City, 300
|Title||Application Date||Patent Date||Status
(Patent / Application)
|Inspection method and system||Aug 29, 2016||May 08, 2018||Patent|
|Local alignment point calibration method in die inspection||Feb 22, 2016||Apr 24, 2018||Patent|
|Apparatus of plural charged-particle beams||Jul 19, 2016||Mar 20, 2018||Patent|
|Method and system for inspecting and grounding an euv mask||Jul 10, 2015||Jan 02, 2018||Patent|
|Charged particle source||Jan 12, 2017||Nov 07, 2017||Patent|