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FASTech Integration


Acquired | Acquired

Total Raised






About FASTech Integration

FASTech, a privately-held company located in Lincoln, Massachusetts, is a market leader in manufacturing execution systems, cell control and equipment interface software for semiconductor manufacturing facilities. Its products include the FACTORYworks(R) integrated Manufacturing Execution System (MES), CELLworks(R) which is the industry standard for cell and station control, STATIONworks(TM) for equipment automation, and the Xsite computerized maintenance management system (CMMS). FASTech is the number one supplier of cell control software and has shipped approximately 8,500 licenses of its CELLworks(R) products to over 1,000 customer sites worldwide and, after the introduction of FACTORYworks(R) MES product in 1995, has gained the number one market position with 32 installations in 1997. Acquired by Brooks Automation Inc. in September 1998.

Headquarters Location

15 Elizabeth Dr

Chelmsford, Massachusetts, 01824,

United States

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FASTech Integration Frequently Asked Questions (FAQ)

  • Where is FASTech Integration's headquarters?

    FASTech Integration's headquarters is located at 15 Elizabeth Dr, Chelmsford.

  • What is FASTech Integration's latest funding round?

    FASTech Integration's latest funding round is Acquired.

  • How much did FASTech Integration raise?

    FASTech Integration raised a total of $2.5M.

  • Who are the investors of FASTech Integration?

    Investors of FASTech Integration include Brooks Automation and Matrix Partners.

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