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Boston MicroSystems

Founded Year



Acquired | Acquired

Total Raised


About Boston MicroSystems

Boston MicroSystems develops environment detection technology solutions and provides micro-sensors and micro-concentrators to the automotive, medical and food industries. The company has created a miniature hotplate that can reach temperatures above 2012°F and is self-contained within a "laboratory" no bigger than a child's shoe. These micro-hotplates are only a few dozen microns across, which is roughly the width of a human hair, yet are capable of serving as substrates, heaters and conductors for thin-film experiments ranging from material analyses to the development of advanced sensors. The hotplates are created using silicon carbide, a robust material that can tolerate extreme heat and reach peak temperatures in less than one-thousandth of a second. Silicon carbide is not only stable at high temperatures; it is also impervious to chemical attack from most materials. As a result the hotplates can be cleaned by burning debris off the surface. The hotplates also contain an integrated temperature gauge and a pair of electrodes that allow researchers to test the electrical properties of various materials that may be deposited onto the hotplates. Researchers are already developing applications such as oxygen and engine emission sensors using the stable, thin-film deposition properties and integrated circuitry of the hotplates. The sensor may have several advantages over devices in today's combustion engines, due to the micro-hotplate's chemical stability, small size, rapid response and low power consumption.

Headquarters Location

30 H 6th Rd

Woburn, Massachusetts, 01801,

United States


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Latest Boston MicroSystems News

Robust MEMS Viscosity Meter for Condition-based Maintenance

Jul 30, 2019

Award Information Contract: N/A Award End Date (Contract End Date):N/A Small Business Information DUNS:N/A Abstract In this NIST SBIR program Boston MicroSystems develops MEMS-based fluid viscosity-density sensors which can be installed in refrigerant system compressors to monitor, in real time, refrigerant system health. Such sensors will provide early detection of water contamination, lubricant degradation and other problems which can lead to catastrophic refrigerant system failure if left uncorrected. Such sensors will also allow scheduling of system maintenance on an as-needed basis, and will reduce system downtime, lower operating costs, and improve system reliability. Boston MicroSystems' proprietary technologies for micromachining harsh environment compatible SiC and AlN materials now allow, for the first time, fabrication of small and inexpensive fluid viscosity and density sensors that can operate in the harsh environments inside refrigeration systems and other machinery. In Phase 1, Boston MicroSystems tested the suitability of three of its already developed SiC-AlN MEMS sensors (microresonators, SAWs and FPWs) for this application, and demonstrated that FPW (flexural plate wave) sensors meet the required performance specifications. In Phase 2, we will develop, characterize and deliver to NIST fully functional prototype refrigerant system health monitors based on our FPW sensors, including packaging for installation into refrigerant system compressors and electronics and software to convert sensor response into system health data. * Information listed above is at the time of submission. *

Boston MicroSystems Frequently Asked Questions (FAQ)

  • When was Boston MicroSystems founded?

    Boston MicroSystems was founded in 1997.

  • Where is Boston MicroSystems's headquarters?

    Boston MicroSystems's headquarters is located at 30 H 6th Rd, Woburn.

  • What is Boston MicroSystems's latest funding round?

    Boston MicroSystems's latest funding round is Acquired.

  • How much did Boston MicroSystems raise?

    Boston MicroSystems raised a total of $4.6M.

  • Who are the investors of Boston MicroSystems?

    Investors of Boston MicroSystems include Pall, National Science Foundation, U.S. Department of Energy, U.S. Department of Homeland Security, U.S. Environmental Protection Agency and 6 more.

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