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Acquired | Acquired

Total Raised




About Beneq

Beneq is a nanotechnology driven company with an IPR portfolio offering industrialised equipment and technology for functional coatings. Beneq's offering includes equipment based on Hot Aerosol Layering Operation (nHALO) and Atomic Layer Deposition (ALD) technologies. The company's processes are protected by IPR which the company license with the company's equipment. Process know-how forms an integral part of the company's deliveries. nHALO is a flame spray technology, used mainly for applying functional coatings on glass and ceramic tiles. It is also used for multi-component nanoparticle synthesis. ALD systems are used to produce accurate, pinhole-free and conformal thin-film coatings on various substrates. In addition to the traditional applications of ALD in the IC industry, the company also offer coating solutions for other industrial applications.

Beneq Headquarter Location

Olarinluoma 9

Espoo, 02200,


+358 9 7599 530

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Expert Collections containing Beneq

Expert Collections are analyst-curated lists that highlight the companies you need to know in the most important technology spaces.

Beneq is included in 1 Expert Collection, including Semiconductors, Chips, and Advanced Electronics.


Semiconductors, Chips, and Advanced Electronics

6,008 items

Companies in this collection develop everything from microprocessors to flash memory, integrated circuits specifically for quantum computing and artificial intelligence to OLED for displays, massive production fabs to circuit design firms, and everything in between.

Beneq Patents

Beneq has filed 64 patents.

The 3 most popular patent topics include:

  • Chemical processes
  • Semiconductor device fabrication
  • Thin film deposition
patents chart

Application Date

Grant Date


Related Topics




Organic electronics, Plasma physics, Molecular electronics, Sun, Display devices


Application Date


Grant Date



Related Topics

Organic electronics, Plasma physics, Molecular electronics, Sun, Display devices



Latest Beneq News

Beneq Unveils Two New ALD Products

Dec 13, 2021

Beneq Unveils Two New ALD Products Monday 6th December 2021 Transform 300 and Prodigy tools designed to meet needs for versaility and simplicity Beneq, a forerunner in industrial production using atomic layer deposition (ALD), has launched two new products for semiconductor device fabrication: the Transform 300 and Prodigy. The Beneq Transform 300 and Prodigy were each designed in response to growing technology requirements in the semiconductor manufacturing sector. “The Transform 300 is designed to meet the growing demand of emerging semiconductor applications at 300 mm for devices such as CMOS image sensors, power devices, micro-OLED/LED, and advanced packaging, which call for a high degree of versatility,” explains Patrick Rabinzohn, VP, Semiconductor ALD at Beneq. “We created Prodigy to address those market segments that need a simple solution supported by high-end technology. It inherits the ALD design and processing knowhow we at Beneq have developed over the last 15 years, packing advanced features in a simpler, targeted industrial form factor,” continues Rabinzohn. Beneq Transform 300 (pictured above) is claimed to be the only 300 mm ALD cluster tool that combines thermal ALD (batch) and plasma ALD (single wafer) technologies to provide a versatile platform for IDMs and foundries. It is dedicated to advanced thin-film applications in CIS, Power, Micro-OLED/LED, Advanced Packaging and other MtM applications. Beneq Tranform 300 is designed to cater to multiple advanced thin-film applications ranging from gate dielectric including in high aspect ratio trenches, to anti-reflection coating, final passivation or encapsulation, Chip-Scale-Packaging and beyond. The Beneq Prodigy is designed for manufacturing compound semiconductors including RF IC's (GaAs/GaN/InP), LED, VCSEL, Light Detectors and for MEMS manufacturers and foundries looking to enhance device performance and reliability through an affordable stand-alone ALD batch tool. Beneq Prodigy provides passivation and encapsulation films across multiple wafer types and sizes. Ebook: Four Considerations for High-Speed Digital Design Success More news articles

  • Where is Beneq's headquarters?

    Beneq's headquarters is located at Olarinluoma 9, Espoo.

  • What is Beneq's latest funding round?

    Beneq's latest funding round is Acquired.

  • How much did Beneq raise?

    Beneq raised a total of $31.84M.

  • Who are the investors of Beneq?

    Investors of Beneq include SRI Intellectual and Rusnano.

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