Search company, investor...



Acquired | Acquired

Total Raised




About Beneq

Beneq is a nanotechnology driven company with an IPR portfolio offering industrialised equipment and technology for functional coatings. Beneq's offering includes equipment based on Hot Aerosol Layering Operation (nHALO) and Atomic Layer Deposition (ALD) technologies. The company's processes are protected by IPR which the company license with the company's equipment. Process know-how forms an integral part of the company's deliveries. nHALO is a flame spray technology, used mainly for applying functional coatings on glass and ceramic tiles. It is also used for multi-component nanoparticle synthesis. ALD systems are used to produce accurate, pinhole-free and conformal thin-film coatings on various substrates. In addition to the traditional applications of ALD in the IC industry, the company also offer coating solutions for other industrial applications.

Headquarters Location

Olarinluoma 9

Espoo, 02200,


+358 9 7599 530

Missing: Beneq's Product Demo & Case Studies

Promote your product offering to tech buyers.

Reach 1000s of buyers who use CB Insights to identify vendors, demo products, and make purchasing decisions.

Missing: Beneq's Product & Differentiators

Don’t let your products get skipped. Buyers use our vendor rankings to shortlist companies and drive requests for proposals (RFPs).

Expert Collections containing Beneq

Expert Collections are analyst-curated lists that highlight the companies you need to know in the most important technology spaces.

Beneq is included in 1 Expert Collection, including Semiconductors, Chips, and Advanced Electronics.


Semiconductors, Chips, and Advanced Electronics

6,343 items

Companies in this collection develop everything from microprocessors to flash memory, integrated circuits specifically for quantum computing and artificial intelligence to OLED for displays, massive production fabs to circuit design firms, and everything in between.

Beneq Patents

Beneq has filed 77 patents.

The 3 most popular patent topics include:

  • Thin film deposition
  • Chemical processes
  • Semiconductor device fabrication
patents chart

Application Date

Grant Date


Related Topics




Thin film deposition, Semiconductor device fabrication, Nanotechnology, Chemical processes, Industrial gases


Application Date


Grant Date



Related Topics

Thin film deposition, Semiconductor device fabrication, Nanotechnology, Chemical processes, Industrial gases



Latest Beneq News

LZH and Beneq cooperate to develop ‘ultrafast’ ALD coatings

Dec 14, 2022

14 Dec 2022 Novel ALD system C2R from Finnish developer Beneq achieves deposition rates of up to 1 µm per hour. Fast, high uniformity and superb coating quality – these properties not only apply to physical vapor deposition methods but also to atomic layer deposition (ALD). Espoo, Finland-based developer of ALD systems and processes Beneq and Laser Zentrum Hannover (LZH) have teamed up to develop a new spatial ALD system that can be used to “coat complex-shaped optics at an unprecedented speed”. Beneq’s ALD system known as C2R achieves speeds of up to 200 rpm with deposition rates of up to 1 µm/hour. LZH notes that ALD is a self-limiting and isotropic process, producing approximately 1 Angstrom of layer thickness per cycle. This allows immense control over the film thickness and the ability to deposit highly conformal films on complex 3D objects and nanostructures, like for example waveguides, lenses and domes. The heart of the spatial ALD system is a turntable that eliminates the need for temporally separated gas dosing as used in batch ALD systems. Instead, pressure and nitrogen curtains geometrically separate four zones within the system. One rotation of the turntable corresponds to one cycle of ALD, exposing the samples to necessary reactants at separate points during the rotation. The partners comment that without the need for lengthy purge steps, the new spatial ALD-system reduces coating times significantly compared to traditional thermal ALD processes, making the tool capable of production scale ALD coatings. Coating complex objects Beneq has developed the system together with LZH to meet the needs for emerging optical coatings. “We were surprised by its [ALD] simple adaptation to optical coatings,” commented LZH’s Head of Optical Components Department, Dr. Andreas Wienke. “For example, think of a strongly curved, small aspheric lens. With classical PVD processes, it is nearly impossible to achieve a conformal coating on the curved surface and the same reflection or transmission values over the whole area. With ALD, it seems so simple and easy to achieve.” LZH’s own in-situ monitoring tool has been implemented recently to improve the C2R’s capabilities. “The broadband monitoring system BBM of the LZH takes complex coatings to the next level. The high-resolution monitoring of the layer growth allows not only to measure online but also to re-engineer the coating on-the-fly, yielding very precise and reproducible thin films,” said Sami Sneck, VP of Advanced ALD at Beneq. “With the new BBM and loadlock additions, we are glad to offer a highly-effective tool to our customers, making ALD even more reliable for optical coatings.” Spatial ALD matches PVD processes like ion beam sputtering in many aspects, including speed and optical performance. It can play to its full advantage when it comes to coating complex shapes and nanostructures. It therefore offers economical and reliable coatings for use in mobile phone cameras or lidar systems in self-driving vehicles. Currently, the LZH is working on coating optical grating structures and polymer optical lenses for use in virtual and augmented reality glasses with the spatial ALD approach. Video explainer

Beneq Frequently Asked Questions (FAQ)

  • Where is Beneq's headquarters?

    Beneq's headquarters is located at Olarinluoma 9, Espoo.

  • What is Beneq's latest funding round?

    Beneq's latest funding round is Acquired.

  • How much did Beneq raise?

    Beneq raised a total of $31.84M.

  • Who are the investors of Beneq?

    Investors of Beneq include SRI & Intellectual and Rusnano.

Discover the right solution for your team

The CB Insights tech market intelligence platform analyzes millions of data points on vendors, products, partnerships, and patents to help your team find their next technology solution.

Request a demo

CBI websites generally use certain cookies to enable better interactions with our sites and services. Use of these cookies, which may be stored on your device, permits us to improve and customize your experience. You can read more about your cookie choices at our privacy policy here. By continuing to use this site you are consenting to these choices.